PENUMBUHAN DAN KARAKTERISASI LAPISAN TIPIS PbTiO3 YANG DISIAPKAN DENGAN TEKNIK SPIN COATING

Abstract

The growth of PbTiO₃ ferroelectric thin films have successfully done. Thin films were made from bulk (powder) PbTiO₃ dissolved in methanol solution. The condensation was mixed during 1 hour to get homogeneous condensation. Thin films were grown above corning substrates by spin coating method. Optimation was done by various of annealing temperature. The physical properties of thin films were characterized by Energi Dispersive X-Ray Spectroscopy (EDS), X-Ray Diffraction (XRD), Scanning and Electron Microscopy (SEM). EDS measurement showed that the stoichiometry composition ratio of Pb/Ti is 1/1.26 at annealing temperature 600^oC and 1/1.29 at annealing temperature 700^oC. The result of XRD pattern showed that crystal structure of PbTiO_3 thin films are tetragonal. The calculated lattice parameters ontained from Chohen Method are a=b= 3.873 Ã… dan c= 4.130Ã…. The result of SEM PbTiO₃ thin film showed that thin film has globular grain size.